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Na-22 tracer diffusion experiments were performed to study the exchange of Na ions between liquid crystal display glass substrates (Corning Code 1737) separated by different types of layers. Different types of layers were generated (i) by RCA cleaning, (ii) by preannealing in wet air, and (iii) by low pressure chemical vapor deposition. A sandwich configuration was used to study the effect of such layers between two glass substrates on the exchange of Na ions between these substrates. The sandwiches were of the type substrate 1 (containing Na-22 tracer)/layer/substrate 2. Diffusion annealing of such sandwiches led to a redistribution of the sodium tracer. This redistribution was analyzed experimentally with regard to the sodium tracer diffusion coefficient in the bulk and the rate of the sodium tracer transfer across the layer. It was found that all three types of layers considered act as barrier layers, i.e., they suppress the exchange of Na ions between glass substrates. © 2001 American Institute of Physics.