Irradiation effect of low energy nitrogen-ion beam during pulsed laser deposition process on the structural and bonding properties of carbon–nitride thin films

Carbon–nitride thin films were deposited by pulsed laser ablation of graphite with assistance of low energy nitrogen-ion-beam irradiation. The nitrogen to carbon (N/C) atomic ratio, bonding state, microstructure, surface morphology, and electrical property of the deposited carbon–nitride films were characterized by x-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, micro-Raman spectroscopy, x-ray diffraction (XRD), atomic force microscopy, and four-probe resistance. The irradiation effect of low energy nitrogen-ion beam on the synthesis of carbon–nitride films was investigated. The N/C atomic ratio of the carbon–nitride films reached the maximum at the ion energy of ∼200 eV. The energy of ∼200 eV was proposed to promote the desired sp³-hybridized carbon and the C₃N₄ phase. Electrical resistivity of the deposited films was also influenced by the low energy nitrogen-ion-beam irradiation. However, the low energy irradiation had little effect on the surface morphology of the films. XRD results revealed the coexistence of the α- and β-C₃N₄ phases in the deposited thin films. © 2001 American Institute of Physics.