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A new deconvolution procedure of conversion electron Mössbauer spectroscopy (CEMS) data based on the computer simulations of nitride phase transformations is described. The method uses the depth distribution of impurity atoms extracted from the Monte Carlo simulations and the phase contributions to the CEMS spectra to calculate the phase distribution profiles. The procedure has been applied to nitrogen implanted iron and provided a significantly extended amount of information on the phase transformations in the FeN system available from the analysis of the Mössbauer data. © 2000 American Institute of Physics.