Strict control of grain size in Co–Cr–Ta recording layer for longitudinal magnetic media by intermittently depositing Cr underlayer

The intermittent deposition technique using 10-nm-thick Cr unit layers was performed to improve structural and magnetic characteristics of the Co–Cr–Ta recording layer deposited on the Cr underlayers. The Cr layers were composed of 10-nm-thick Cr unit layers intermittently deposited at intervals of 3 min or with N₂ flow for 10 s between the depositions of each unit layer, in order to prevent the growth of Cr crystallites. The intermittent deposition of the Cr underlayers decreased in crystallite size _Cr(200) and increased the coercivity H_c of the Co–Cr–Ta recording layer. N₂ flow degraded the crystalinity of the Cr underlayer and decreased H_c|| of the recording layer. © 2000 American Institute of Physics.