Normalized magnetization vector Me of ultrathin Co–Cr–Ta films under the canted magnetic field were derived from the results of anomalous Hall voltage and the magnetization measured by a vibrating sample magnetometer. The film deposited at high substrate temperature revealed a relatively large amount of an in-plane component because of the faint c-axis orientation in the perpendicular direction of the Co–Cr–Ta crystallites. The in-plane component at the remanent state seems to be larger for the film with worse c-axis orientation. The Pt underlayer was normalized to promote c-axis orientation in Co–Cr–Ta films deposited on it at a high substrate temperature above 200 °C. A 30 nm-thick Co77Cr20Ta3 film deposited on a 20-nm-thick Pt underlayer exhibited large perpendicular coercivity. The locus of normalized magnetization of the Co77Cr20Ta3(30 nm)/Pt(20 nm) implied that the film revealed a large perpendicular magnetization component even though the magnetic field was applied in the direction out of the normal line. © 2000 American Institute of Physics.