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Direct imaging of end-of-range compaction in ion beam irradiated silica waveguides by atomic force microscopy

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4 Author(s)
von Bibra, M.L. ; The School of Physics, University of Melbourne, Victoria, 3010, Australia ; Roberts, A. ; Mulvaney, P. ; Huntington, S.T.

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The end-of-range compaction induced by megaelectronvolt proton irradiation of fused silica has been imaged by atomic force microscopy. A maximum surface compaction of 50 nm was measured for an ion dose of 4.0×1015ions cm-2. A linear correlation between ion dose and compaction has been observed in the range of 1.0 to 4.0×1016ions cm-2. When the samples were left at room temperature over a period of several months, the amount of compaction appeared to decrease significantly which suggests some temporal annealing of the waveguides has occurred. © 2000 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:87 ,  Issue: 12 )