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Electron ejection from MgO thin films by low energy noble gas ions: Energy dependence and initial instability of the secondary electron emission coefficient

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3 Author(s)
Moon, Kyoung Sup ; Division of Electrical Engineering, Seoul National University, San 56-1, Shillim-dong, Kwanak-gu, Seoul 151-742, Korea ; Lee, Jihwa ; Whang, Ki-Woong

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Low energy ion-induced secondary electron emission from the surface of thin (500–5000 Å) polycrystalline MgO films has been investigated with various noble gas ions at energies ranging from 45 to 300 eV. The dependence of secondary electron emission coefficient γi on the type and energy of ions is reported and interpreted in terms of electron ejection mechanisms. As-deposited MgO films showed an initial fluctuation in the secondary emission current, which upon annealing or after a certain ion bombardment time irreversibly disappeared. © 1999 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:86 ,  Issue: 7 )