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The effects of hydrogen bonds on the adhesion of inorganic oxide particles on hydrophilic silicon surfaces

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3 Author(s)
Wu, X. ; Département de Génie Physique, Groupe de Recherche en Physique et Technologie des Couches Minces, École Polytechnique de Montréal, C.P. 6079, Succursale Centre-Ville, Montréal, Québec H3C 3A7, Canada ; Sacher, E. ; Meunier, M.

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Hydrogen bonds have a dominant effect on the adhesion of inorganic oxide particles, such as SiO2 and Al2O3, to hydrophilic silicon surfaces. An analysis of adhesion forces due to hydrogen bonds between particle and substrate surfaces has been carried out, and is used to interpret the efficiencies of removing polystyrene latex, SiO2, and Al2O3 particles from a hydrophilic silicon surface by laser cleaning. Evidence of the dominant effect of hydrogen bonding was confirmed by using alcohol instead of water during particle deposition. © 1999 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:86 ,  Issue: 3 )