By Topic

Correlation between microstructure and optical properties of Ge2Sb2Te5 thin films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Kim, Jin-Hong ; Devices and Materials Laboratory, LG Corporate Institute of Technology, 16 Woomyeon-Dong, Seocho-Gu, Seoul 137-724, Korea

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.371725 

The microstructure and optical properties of amorphous and crystalline Ge2Sb2Te5 thin films prepared under different sputtering conditions were investigated. The microstructure of amorphous films was modified by changing the sputtering Ar gas pressure during the deposition. The optical properties and the microstructure of the sample prepared at high Ar gas pressure were remarkably different from the samples prepared at low pressures. A strong correlation between the microstructure and optical properties of Ge2Sb2Te5 thin films was found. © 1999 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:86 ,  Issue: 12 )