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On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

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9 Author(s)
Boisset, G.C. ; Dept. of Electr. Eng., McGill Univ., Montreal, Que., Canada ; Robertson, B. ; Hsiao, W.S. ; Taghizadeh, M.R.
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A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.

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Photonics Technology Letters, IEEE  (Volume:8 ,  Issue: 7 )