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Thermal deposition and characterization of Se-Sn mixed oxide thin films for NO gas sensing applications

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4 Author(s)
Manno, D. ; Dipartimento di Scienza dei Materiali, Università di Lecce, Via Arnesano, I-73100 Lecce, Italy ; Micocci, G. ; Serra, A. ; Tepore, A.

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Thin films made by a mixing of selenium and tin oxides have been obtained by high vacuum thermal evaporation. A detailed optical, electrical and structural characterization has been performed on all deposited films. Electron microscopy observations show that the films consist of nanosized grains of SeO2 and SnO2 homogeneously arranged. The NO gas sensing properties of this material have been tested in controlled atmosphere. In addition, the influence of oxygen in the test gas mixture was analyzed. © 1998 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:83 ,  Issue: 7 )

Date of Publication:

Apr 1998

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