Cart (Loading....) | Create Account
Close category search window
 

Comparison of a consistent theory of radio frequency sheaths with step models

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Gierling, J. ; Institut für Theoretische Physik 1, Ruhr–Universität Bochum, D–44780 Bochum. Germany ; Riemann, K.‐U.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.366565 

In order to find analytically tractable models for the electrode sheath of a capacitively coupled rf discharge, step models are used in the literature, describing the electron density by a step function oscillating with the radio frequency ω pi≪ω≪ωpe). Comparison of the results of these step models with the results of numerical calculations shows similar current–voltage characteristics for symmetric discharges. On the other hand, distinct deviations in the spatial behavior of field and potential for a single sheath are observed. We discuss the deviations of the step models and show that they arise from systematic errors in the boundary conditions which are due to misinterpretations of the asymptotic two scale formalism. On the basis of a systematic two scale theory, we develop an improved step model with correct boundary conditions. © 1998 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:83 ,  Issue: 7 )

Date of Publication:

Apr 1998

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.