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Far-infrared dielectric constant of porous silicon layers measured by terahertz time-domain spectroscopy

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5 Author(s)
Labbe-Lavigne, S. ; Laboratoire d’Hyperfréquences et Caractérisation, Université de Savoie, 73376 Le Bourget du Lac CEDEX, France ; Barret, S. ; Garet, F. ; Duvillaret, L.
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We measure the refractive index and the absorption of porous silicon layers in the millimetric and submillimetric wavelength range using the terahertz time-domain spectroscopy technique. For the studied range of porosity (55%–76%), the refractive index of porous silicon is rather well described by mixture theories, in which the refractive index of bulk silicon enters as a main parameter. © 1998 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:83 ,  Issue: 11 )