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Structural modifications of alumina implanted with zirconium, copper, and titanium ions

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4 Author(s)
Bigarre, J. ; Laboratoire Ingiénierie et Fonctionnalisation des Surfaces, UMR 5621, Ecole Centrale de Lyon, 69130 Ecully, France ; Fayeulle, S. ; Treheux, D. ; Moncoffre, N.

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Microstructural modifications (amorphization, lattice deformation, phase transformations) in alumina induced by implantation of zirconium, copper, or titanium ions and by postimplantation thermal annealings were studied using grazing incidence x-ray diffraction. It was shown that the amount of lattice deformation and the type of damage resulting in the lattice depend on the ion implanted. When zirconium was implanted, the alumina lattice was highly deformed. Amorphization was observed when a high ion dose was implanted. Copper implantation led to the formation of gamma alumina. With titanium ions, very high strain was created and delta alumina was formed. After postimplantation annealings, lattices returned to their equilibrium state through crystallization of alpha alumina and precipitation of oxides of the implanted species (ZrO2, CuO and CuAl2O4, and TiO2). © 1997 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:82 ,  Issue: 8 )

Date of Publication:

Oct 1997

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