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Measurement of thermal diffusivities of thin metallic films using the ac calorimetric method

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4 Author(s)
Yamane, Tsuneyuki ; Toray Research Center, Inc., Sonoyama 3-3-7, Otsu, Shiga 520, Japan ; Mori, Yuji ; Katayama, Shin-ichiro ; Todoki, Minoru

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The thermal diffusivities of thin films of evaporated metal less than 1×10-6 m thick have been measured using the light-irradiation ac calorimetric method. The thermal diffusivities of metallic thin films become smaller than those of the bulk as the thickness of the metallic thin films decreases. It is determined, using x-ray diffraction measurement, that the decrease of thermal diffusivity of thin films of evaporated metal is caused by a decrease in crystalline size. © 1997 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:82 ,  Issue: 3 )