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Lead zirconate titanate (PZT) thin films were prepared by reactive coevaporation with high-concentration ozone. PZT thin films that demonstrate the highest charge storage density (280 fC/μm2 at 1.5 V for 75-nm-thick film) yet reported have been fabricated. No fatigue was observed after 1011 polarization switching cycles even though a Pt electrode is used. A low leakage current of ≪10-7 A/cm2 at 1.5 V was attained. These PZT films are promising candidates of an alternative capacitor dielectric for dynamic random access memory (DRAM) and ferroelectric nonvolatile memories. © 1997 American Institute of Physics.
Published in:
Journal of Applied Physics
(Volume:81
,
Issue:
6
)
Date of Publication: Mar 1997
- Page(s):
- 2755 - 2759
- ISSN :
- 0021-8979
- Digital Object Identifier :
- 10.1063/1.363980
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 June 2009
- Issue Date :
- Mar 1997
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