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Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process

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4 Author(s)
Barrow, D.A. ; Datec Coating Corporation, Stirling Hall, 99 University Avenue, Kingston, Ontario K7L 3N6, Canada ; Petroff, T.E. ; Tandon, R.P. ; Sayer, M.

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Lead zirconate titanate (PZT) films 60 μm in thickness have been fabricated using a new sol gel based process. PZT powders are dispersed in a sol gel matrix to form a 0–3 ceramic/ceramic composite. The dielectric properties of these films have been studied as a function of powder concentration, frequency, and temperature. The characteristic Curie point is observed at 420 °C. The ferroelectric behavior measured in terms of the remanant polarization (Pr=35 μC/cm2) and coercive field (Ec=20 kV/cm) was an improvement over values quoted for thin PZT films but lower than that of bulk ceramic. The piezoelectric properties d33 (325 pC/N) and d31 (-80 pC/N) were comparable with those of the bulk ceramic. © 1997 American Institute of Physics.

Published in:
Journal of Applied Physics  (Volume:81 ,  Issue: 2 )

Date of Publication: Jan 1997

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