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A modified method of side data analysis of deep level transient spectroscopy (DLTS) spectra obtained by Lang’s method [J. Appl. Phys. 45, 3023 (1974)] is proposed. It uses two DLTS spectra determined for the same or different ratio of the sampling times. Simple analytical formulas are given to utilize their low‐ and high‐temperature side data in the Arrhenius analysis. The proposed method eliminates the temperature dependence of the spectrum amplitude and does not require the accurate determination of the temperatures of DLTS spectra in their maxima. © 1996 American Institute of Physics.