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Novel application of quantum well intermixing implant buffer layer to enable high-density photonic integrated circuits in InP

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8 Author(s)
Steven C. Nicholes ; Department of Materials, University of California, Santa Barbara 93106, USA ; Milan L. Masanovic ; Jonathon Barton ; Erik J. Norberg
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We demonstrate a novel technique for free-carrier absorption reduction using an InP buffer layer with quantum well intermixing. Application of this technique enabled fabrication of monolithic tunable optical routers with more than 200 functions.

Published in:

Indium Phosphide & Related Materials, 2009. IPRM '09. IEEE International Conference on

Date of Conference:

10-14 May 2009