High-sensitivity noncontact atomic force microscope/scanning tunneling microscope (nc AFM/STM) operating at subangstrom oscillation amplitudes for atomic resolution imaging and force spectroscopy

We describe a new, highly sensitive noncontact atomic force microscope/scanning tunneling microscope (STM) operating in ultrahigh vacuum (UHV) with subangstrom oscillation amplitudes for atomic resolution imaging and force–distance spectroscopy. A novel fiber interferometer with

∼4×10-4 Å/

Hz

noise level is employed to detect cantilever displacements. Subangstrom oscillation amplitude is applied to the lever at a frequency well below the resonance and changes in the oscillation amplitude due to tip–sample force interactions are measured with a lock-in amplifier. Quantitative force gradient images can be obtained simultaneously with the STM topography. Employment of subangstrom oscillation amplitudes lets us perform force–distance measurements, which reveal very short-range force interactions, consistent with the theory. Performance of the microscope is demonstrated with quantitative atomic resolution images of Si(111)(7×7) and force–distance curves showing short interaction range, all obtained with ≪0.25 Å lever oscillation amplitude. Our technique is not limited to UHV only and operation under liquids and air is feasible. © 2003 American Institute of Physics.