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Submicron resolution infrared microscopy by use of a near-field scanning optical microscope with an apertured cantilever

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3 Author(s)
Masaki, Tatsuhiro ; Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan ; Inouye, Y. ; Kawata, S.

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We extend the spectral range of near-field infrared microscopy attaining submicron resolution by using tunable infrared radiation generated by difference frequency generation and an apertured cantilever. The custom-built cantilever has a hollow tip with a wide opening angle and offers two orders of magnitude higher optical throughput than that of other IR probes. In near-field observation of a line/space structured poly(methylmethacrylate) film at a 5.78 μm wavelength corresponding to absorption band of the C=O bonds, the microscope achieved a λ/7 spatial resolution, less than 1 μm. This shows the possibility of submicron resolution infrared microscopy in the fingerprint region.

Published in:

Review of Scientific Instruments  (Volume:75 ,  Issue: 10 )