By Topic

Development of magnetically preloaded air bearings for a linear slide: Active compensation of three degrees of freedom motion errors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Ro, Seung-Kook ; Intelligent Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon 305-343, Republic of Korea ; Soohyun Kim ; Yoon Keun Kwak ; Park, Chun-Hong

Your organization might have access to this article on the publisher's site. To check, click on this link: 

This article describes a linear air-bearing stage that uses active control to compensate for its motion errors. The active control is based on preloads generated by magnetic actuators, which were designed to generate nominal preloads for the air bearings using permanent magnets to maintain the desired stiffness while changing the air-bearing clearance by varying the magnetic flux generated by the current in electromagnetic coils. A single-axis linear stage with a linear motor and 240 mm of travel range was built to verify this design concept and used to test its performance. The motion of the table in three directions was controlled with four magnetic actuators driven by current amplifiers and a DSP (Digital Signal Processor)-based digital controller. The motion errors were measured using a laser interferometer combined with a two-probe method, and had 0.085 μm of repeatability for the straightness error. As a result of feed-forward active compensation, the errors were reduced from 1.09 to 0.11 μm for the vertical motion, from 9.42 to 0.18 arcsec for the pitch motion, and from 2.42 to 0.18 arcsec for the roll motion.

Published in:

Review of Scientific Instruments  (Volume:79 ,  Issue: 3 )