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Design, implementation, and control of a six-axis compliant stage

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4 Author(s)
Hu, Kaixuan ; Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio 43210, USA ; Kim, Jung H. ; Schmiedeler, James ; Menq, C.-H.

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This paper presents the development of a new compact six-axis compliant stage employing piezoelectric actuators to achieve six-axis actuation with nanometer resolution. The integration of direct metrology in the object space, based on real-time visual feedback, enables high-precision motion control. In order to achieve greater motion range, the simple and compact decoupled mechanical structure utilizes two-tap displacement amplifiers for in-plane motion and semibridge amplifiers for out-of-plane motion. The kinematic analysis of the stage is presented. Laterally sampled white light interferometry was implemented to measure the out-of-plane motion of the stage, and a measurement model associated with the designed target patterns is developed to estimate the in-plane motion in real time. Together, they form a visual tracking system and are integrated with the six-axis compliant stage to realize precision six-axis real-time visual servo-control. Experimental results demonstrate that the six-axis compliant stage has the motion range of 77.42 μm, 67.45 μm, 24.56 μm, 0.93 mrad, 0.95 mrad, and 3.10 mrad, and the resolution of ±5 nm, ±8 nm, ±10 nm, ±10 μrad, ±10 μrad, and ±20 μrad for x-axis, y-axis, and z-axis translation and rotation, respectively.

Published in:

Review of Scientific Instruments  (Volume:79 ,  Issue: 2 )