By Topic

Enlarged atomic force microscopy scanning scope: Novel sample-holder device with millimeter range

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
9 Author(s)
Sinno, A. ; LISV, University of Versailles, 45 Avenue des Etats Unis, 78035 Versailles, France ; Ruaux, P. ; Chassagne, L. ; Topcu, S.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link: 

We propose a homemade sample-holder unit used for nanopositionning in two dimensions with a millimeter traveling range. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. For this we chose to characterize highly integrated optical structures. For this purpose, the sample holder was integrated into an atomic force microscope. A millimeter scale topographical image demonstrates the overall performances of the combined system.

Published in:

Review of Scientific Instruments  (Volume:78 ,  Issue: 9 )