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Development of a parallel detection and processing system using a multidetector array for wave field restoration in scanning transmission electron microscopy

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8 Author(s)
Taya, Masaki ; Department of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan ; Matsutani, Takaomi ; Ikuta, Takashi ; Saito, Hidekazu
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A parallel image detection and image processing system for scanning transmission electron microscopy was developed using a multidetector array consisting of a multianode photomultiplier tube arranged in an 8×8 square array. The system enables the taking of 64 images simultaneously from different scattered directions with a scanning time of 2.6 s. Using the 64 images, phase and amplitude contrast images of gold particles on an amorphous carbon thin film could be separately reconstructed by applying respective 8 shaped bandpass Fourier filters for each image and multiplying the phase and amplitude reconstructing factors.

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Review of Scientific Instruments  (Volume:78 ,  Issue: 8 )