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Modified free vibrating beam method for characterization of effective e31 coefficient and leakage resistance of piezoelectric thin films

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5 Author(s)
Defay, Emmanuel ; RF Components Laboratory, CEA-LETI, 17 Avenue des Martyrs, 38054 Grenoble, France ; Zinck, C. ; Malhaire, C. ; Baboux, N.
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A modified free vibrating beam method has been developed in order to characterize the effective e31 piezoelectric transversal coefficient and the leakage resistance of piezoelectric thin films deposited onto a silicon beam. The main advantage of this method is that it requires no extra electrical measurements. Experiment was realized on lead zirconate titanate thin films.

Published in:

Review of Scientific Instruments  (Volume:77 ,  Issue: 10 )

Date of Publication:

Oct 2006

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