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Efficient electrochemical etching method to fabricate sharp metallic tips for scanning probe microscopes

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6 Author(s)
Kim, Pilkyu ; Department of Mechatronics Gwangju Institute of Science and Technology, 1 Oryong-dong Buk-gu, Gwangju 500-712, Republic of Korea ; Kim, Jun Ho ; Jeong, Mun Seok ; Do-Kyeong Ko
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A new technique based on electrochemical etching for the fabrication of sharp metallic tips for scanning probe microscopes is introduced. In the proposed method, a small Teflon mass is attached to the end of an immersed tungsten wire using an aluminum tape, which leads to a significant enhancement of yield rate of sharp tungsten tips with an apex size below 100 nm to over 60%. The functionality of the tungsten tips fabricated by the proposed method is verified by measuring the topography of a standard sample using a shear-force scanning probe microscope.

Published in:

Review of Scientific Instruments  (Volume:77 ,  Issue: 10 )