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Multilayer coating for 30.4 nm

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4 Author(s)
Yoshikawa, Ichiro ; University of Tokyo, Earth and Planetary Science, 7-3-1 Hongo, Bunkyo, Tokyo 113-0033, Japan ; Murachi, Tetsunori ; Takenaka, Hisataka ; Ichimaru, Satoshi

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A multilayer coating of Mo/Si is usually used for space science in the spectral range of extreme ultraviolet, especially for He-II (30.4 nm) radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15%–20% is achieved. But the space science community needs a higher reflective coating at 30.4 nm for the future satellite missions. In this work, we report the design of a multilayer, consisting of a pair of Mg and SiC, and its fabrication, and result of the reflectance.

Published in:

Review of Scientific Instruments  (Volume:76 ,  Issue: 6 )

Date of Publication:

Jun 2005

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