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Development of low noise cantilever deflection sensor for multienvironment frequency-modulation atomic force microscopy

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5 Author(s)
Fukuma, Takeshi ; Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan ; Kimura, Masayuki ; Kobayashi, Kei ; Matsushige, Kazumi
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We have developed a low noise cantilever deflection sensor with a deflection noise density of

17 fm/
by optimizing the parameters used in optical beam deflection (OBD) method. Using this sensor, we have developed a multienvironment frequency-modulation atomic force microscope (FM-AFM) that can achieve true molecular resolution in various environments such as in moderate vacuum, air, and liquid. The low noise characteristic of the deflection sensor makes it possible to obtain a maximum frequency sensitivity limited by the thermal Brownian motion of the cantilever in every environment. In this paper, the major noise sources in OBD method are discussed in both theoretical and experimental aspects. The excellent noise performance of the deflection sensor is demonstrated in deflection and frequency measurements. True molecular-resolution FM-AFM images of a polydiacetylene single crystal taken in vacuum, air, and water are presented.

Published in:

Review of Scientific Instruments  (Volume:76 ,  Issue: 5 )