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Motion error compensation of a mechanical contact spindle using a multi-degree-of-freedom micropositioning stage

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3 Author(s)
Oiwa, T. ; Department of Mechanical Engineering, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8561, Japan ; Kaneko, Katsumi ; Kyusojin, Akira

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A three-degree-of-freedom micropositioning stage has been developed for controlling spindle runout. The stage consists of three wedge-shaped plates and PZT-stacked actuators. This stage can expand to 6 degrees of freedom and moves precisely without a stick-slip effect because there is no friction. Moreover, this stage has high loading capacity and stiffness because most of the load is placed on actuators having high compressive strength. In a trial, a PI controller actuated the stage to decrease the runout of a ball-bearing spindle weighing 400 N. As a result, radial and axial motion errors of the spindle mounted on the stage were decreased from 0.2 μm to 0.04 μm.

Published in:

Review of Scientific Instruments  (Volume:76 ,  Issue: 2 )