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Add-on transmission attachments for the scanning electron microscope

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4 Author(s)
Khursheed, A. ; Electrical and Computer Engineering Department, National University of Singapore, 4 Engineering Drive 3, Singapore 117576 ; Karuppiah, N. ; Osterberg, M. ; Thong, J.T.L.

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This article presents simulation and experimental results for add-on transmission attachments that have been developed for the scanning electron microscope (SEM). A primary beam energy of around 30 keV is used to irradiate thin test specimens (≪100 nm). A transmission lens attachment enables a conventional field emission SEM to improve its image resolution by an order of magnitude, providing an image magnification of several million and a spatial resolution down to 0.3 nm. In addition, a compact energy electron loss spectrometer attachment has been developed that uses the SEM’s built-in secondary electron detector. © 2003 American Institute of Physics.

Published in:

Review of Scientific Instruments  (Volume:74 ,  Issue: 1 )