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In this article, the feasibility of atomic force microscope (AFM) scanning moiré on a cross-line diffraction grating has been studied. The AFM scanning moiré technique has been applied to measure the thermal deformation of electronic packages successfully. This technique is convenient to perform the mismatch method, also it could obtain a higher resolution than any other moiré method. © 2001 American Institute of Physics.
Published in:
Review of Scientific Instruments
(Volume:72
,
Issue:
4
)
Date of Publication: Apr 2001
- Page(s):
- 2180 - 2185
- ISSN :
- 0034-6748
- Digital Object Identifier :
- 10.1063/1.1350641
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 June 2009
- Issue Date :
- Apr 2001
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