Referenced Items are not available for this document.
Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1351837
We report a near-field microwave microscopy based on a novel scanning probe—a long and narrow slot microfabricated on the convex surface of the dielectric resonator. The probe is mounted in the cylindrical waveguide. Tunable coupling to the probe is effectuated through the variable air gap. The whole probe is very compact, has a coaxial input, operates at 25–30 GHz, has a spatial resolution of 1–10 μm and, most important, has a low impedance of ∼20 Ω. This allows us to use it for characterization of metallic layers with high conductivity, in particular, thickness mapping. © 2001 American Institute of Physics.
Published in:
Review of Scientific Instruments
(Volume:72
,
Issue:
4
)
Date of Publication: Apr 2001
- Page(s):
- 2073 - 2079
- ISSN :
- 0034-6748
- Digital Object Identifier :
- 10.1063/1.1351837
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 June 2009
- Issue Date :
- Apr 2001
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
