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A vacuum gauge has been designed and fabricated using a new type of sensor element, the semiconducting barium titanate positive temperature coefficient (PTC) thermistor. It covers a much wider range and better resolution compared to conventional Pirani gauge and other thermistor vacuum gauges particularly in the low vacuum levels due to its extreme high temperature coefficient. The details of design criteria of the instrument and its performance characteristics have been discussed. Due to the unique autocurrent limiting and stabilizing capabilities of a PTC thermistor, the fabrication of the instrument appears to be much cheaper. © 2000 American Institute of Physics.
Published in:
Review of Scientific Instruments
(Volume:71
,
Issue:
12
)
Date of Publication: Dec 2000
- Page(s):
- 4670 - 4673
- ISSN :
- 0034-6748
- Digital Object Identifier :
- 10.1063/1.1287619
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 June 2009
- Issue Date :
- Dec 2000
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