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Real time measurement of current and voltage in discharge pumped KrF* excimer lasers

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2 Author(s)
Onkels, E.D. ; Institut für Angewandte Physik, Technische Hochschule Darmstadt, Schlossgartenstr. 7, D 64289 Darmstadt, Germany ; Seelig, W.

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An advanced measurement method for the dynamic current voltage characteristics of fast transversely excited atmosphere excimer laser discharges is presented. In contrast to well-known numerical techniques, inductive components are eliminated from the measured discharge gap voltage directly during operation of the laser by means of a fast video amplifier circuit. Comparison of experimental data obtained from a laboratory KrF* excimer laser with theoretical data shows that the achieved resolution is sufficiently high to reveal actual halogen donor concentration and arcing in the discharge. © 1997 American Institute of Physics.

Published in:

Review of Scientific Instruments  (Volume:68 ,  Issue: 8 )