By Topic

In situ observation of infrared spectra of some molecular fragments and products in rf discharge plasmas generated in an absorption cell of a Fourier transform infrared spectrometer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Iinuma, K. ; Department of Quantum Science and Energy Engineering, Tohoku University, Sendai 980-77, Japan ; Sasaki, N. ; Takahashi, T. ; Fujisawa, M.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1148140 

We have developed a Fourier transform infrared spectrometer, the absorption cell of which is utilized as a plasma reactor by winding the rf coil around it to couple directly the rf power. The infrared absorption spectra of some fragmented and synthesized molecules produced in the rf glow-discharge plasma are observed by employing five source gases: CO2, CD4, CF4 (in Kr), SF6, and a N2/O2 mixture. The measurements are made at 0.5 cm-1 apodized resolution on 7.5 and 7.8 MHz rf frequencies with the input rf power ranging between 30–75 W. The products assigned at present are: carbon monoxide in CO2 plasma, CD2H2 in CD4 plasma, and nitrous oxide (N2O) in a N2/O2-mixture plasma. A strong but not clearly assigned spectrum of fragmented molecules in SF6 plasma can also be observed. © 1997 American Institute of Physics.

Published in:

Review of Scientific Instruments  (Volume:68 ,  Issue: 6 )