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In situ observation of infrared spectra of some molecular fragments and products in rf discharge plasmas generated in an absorption cell of a Fourier transform infrared spectrometer

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8 Author(s)
Iinuma, K. ; Department of Quantum Science and Energy Engineering, Tohoku University, Sendai 980-77, Japan ; Sasaki, N. ; Takahashi, T. ; Fujisawa, M.
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We have developed a Fourier transform infrared spectrometer, the absorption cell of which is utilized as a plasma reactor by winding the rf coil around it to couple directly the rf power. The infrared absorption spectra of some fragmented and synthesized molecules produced in the rf glow-discharge plasma are observed by employing five source gases: CO2, CD4, CF4 (in Kr), SF6, and a N2/O2 mixture. The measurements are made at 0.5 cm-1 apodized resolution on 7.5 and 7.8 MHz rf frequencies with the input rf power ranging between 30–75 W. The products assigned at present are: carbon monoxide in CO2 plasma, CD2H2 in CD4 plasma, and nitrous oxide (N2O) in a N2/O2-mixture plasma. A strong but not clearly assigned spectrum of fragmented molecules in SF6 plasma can also be observed. © 1997 American Institute of Physics.

Published in:

Review of Scientific Instruments  (Volume:68 ,  Issue: 6 )