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Shear-force detection based on an external cavity laser interferometer for a compact scanning near field optical microscope

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3 Author(s)
Pfeffer, M. ; Institut d’Optique Appliquée, Ecole polytechnique fédérale, 1015 Lausanne, Switzerland ; Lambelet, P. ; Marquis-Weible, F.

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A compact near field optical microscope module is presented, with shear-force detection based on an external cavity laser interferometer. Its Al2O3 structure allows minimal sensitivity towards thermal and mechanical perturbations. Together with a precise and easy-to-handle tip fixation system, involving standard commercially available elements, this module is simple to use, and allows to detect a minimum displacement of 5.9 pmrms/

with a large working distance of 10.5 mm. © 1997 American Institute of Physics.

Published in:

Review of Scientific Instruments  (Volume:68 ,  Issue: 12 )