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Wide range standard for scanning probe microscopy height calibration

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3 Author(s)
Brodowsky, Hanna M. ; Fakultät für Physik und Geowissenschaften, Universität Leipzig, Linnéstr.5, D 04103 Leipzig, Germany ; Boehnke, Undine‐C. ; Kremer, Friedrich

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A new method for height calibration of scanning probe microscopes (SPMs), applicable for any height from 0.3 nm to beyond 100 nm, is presented. A previously calibrated piezo is set in a SPM instead of a sample. A definite time‐periodic elongation at a corresponding voltage can serve as height standard. The method is easy to use, tuneable in a wide range and exact to the limits of the SPM itself. © 1996 American Institute of Physics.

Published in:

Review of Scientific Instruments  (Volume:67 ,  Issue: 12 )