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A new method for height calibration of scanning probe microscopes (SPMs), applicable for any height from 0.3 nm to beyond 100 nm, is presented. A previously calibrated piezo is set in a SPM instead of a sample. A definite time‐periodic elongation at a corresponding voltage can serve as height standard. The method is easy to use, tuneable in a wide range and exact to the limits of the SPM itself. © 1996 American Institute of Physics.