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A new and simple interferometric method for height calibration of AFM piezo scanners is presented. Except for a small mirror no additional equipment is required since the fixed wavelength of the laser diode is used as a calibration standard. The calibration is appliable in the range between several ten nm and several μm. Besides vertical calibration many problems of piezo elements like hysteresis, nonlinearity, creep, derating, etc. and their dependence on scan parameters or temperature can be investigated. © 1995 American Institute of Physics.