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Geometrical distortions of scanning tunneling or atomic force microscope pictures can be caused by delayed response of the piezo‐ceramics and errors of the nonlinear feedback system. The images are adversely affected mostly at the boundaries where the tip motion is reversed and also at surface steps. Assuming logarithmic corrections for the time dependence of the piezo response and for the feedback nonlinearity, it is shown how these errors can be eliminated. The procedure is applied to three test samples: well‐ordered clean single‐crystal gold and copper surfaces, for which the correction parameters are determined as a function of temperature, scan velocity, and the place where the tips move into the scanned area. Gathering this information from various test samples, a data base can be built up that can be used to correct other samples recorded under the same conditions.