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z calibration of the atomic force microscope by means of a pyramidal tip

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1 Author(s)
Jensen, F. ; Mikroelektronik Centeret, DTH, Building 345e, DK‐2800 Lyngby, Denmark

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A new method for imaging the probe tip of an atomic force microscope cantilever by the atomic force microscope itself (self‐imaging) is presented. The self‐imaging is accomplished by scanning the probe tip across a sharper tip on the surface. By using a pyramidal probe tip with a very well‐defined aspect ratio, this technique provides an excellent z‐calibration standard for the atomic force microscope.

Published in:

Review of Scientific Instruments  (Volume:64 ,  Issue: 9 )

Date of Publication:

Sep 1993

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