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Prototyping of Beam Shaping Diffraction Gratings by AFM Nanoscale Patterning

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3 Author(s)
Lo-Ming Fok ; Networked Sensors & Robot. Lab., Chinese Univ. of Hong Kong, Hong Kong, China ; Yun-Hui Liu ; Li, W.J.

Diffractive gratings are often associated with the use of beam shaping device utilizing a monochromatic source. They could provide high flexibility in design and offer a precise control according to applications. The design of diffraction grating often makes several iterations through design and prototyping before completion. In this paper, we demonstrate a computer-aided design method and a mechanical method of prototyping diffractive grating optics for beam shaping, which aim at improve productivity through greater design flexibility, rapid fabrication and cost reduction. A description of the optical design is presented along with a discussion on the integrated patterning system.

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Automation Science and Engineering, IEEE Transactions on  (Volume:7 ,  Issue: 1 )