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Parts‐per‐million water vapor generating system used to simulate moisture in small integrated circuit packages

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1 Author(s)
Hartley, Johnny L. ; Measurements Standards Laboratory Division, Sandia Laboratories, Albuquerque, New Mexico 87185

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1135337 

A simple, portable system has been developed and tested for generating a known water–vapor content is selected permanent gases or gas mixtures. Parts‐per‐million values ranging from 250 to 20 000 are generated in a continuous flowing stream at flowrates ranging from 50 to 200 cm3/min. A known volume of the flowing gas can be selected to simulate the internal free volume and internal pressure of hermetically sealed packages as small as 0.04 cm3. By using a variety of available connectors, the selected volume of gas may be transferred into the inlet system of a mass spectrometer for water–vapor calibration. Generator stabilizing time and upper flowrate limits are given along with test results when compared to a Transfer Humidity Standard.

Published in:
Review of Scientific Instruments  (Volume:49 ,  Issue: 12 )

Date of Publication: Dec 1978

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