Referenced Items are not available for this document.
The software program called STADIUM has been developed by researchers at Florida Institute of Technology (Florida Tech) through funding from SEMATECH. The purpose of STADIUM is to facilitate the statistical design and simulation of integrated circuit processes, devices and products. It is a software shell which uses existing simulators in a design of experiments statistical methodology and allows the estimation of the statistical response of the manufacturing environment. This paper presents some of the methodology and implementation details of STADIUM.
Published in:
Southcon/94. Conference Record
Date of Conference: 29-31 March 1994
- Page(s):
- 584 - 588
- Meeting Date :
- 29 Mar 1994-31 Mar 1994
- Print ISBN:
- 0-7803-9988-9
- INSPEC Accession Number:
- 5296535
- Conference Location :
- Orlando, FL, USA
- Digital Object Identifier :
- 10.1109/SOUTHC.1994.498170
- Product Type:
- Conference Publications
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