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An integrated power supply system for low-power 3.3V electronics using on-chip polymer electrolyte membrane (PEM) fuel cells

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7 Author(s)
Frank, M. ; IMTEK, Univ. of Freiburg, Freiburg ; Kuhl, M. ; Erdler, G. ; Freund, I.
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Recent advances in miniaturization of both electronics and MEMS devices have resulted in a considerable power reduction. On the other hand, the size of power supplies for such miniaturized devices has been only marginally scaled down. In this paper a stabilized power supply realized by monolithically integrated micro fuel cells within an extended CMOS process is presented. The key feature of this set-up is the parallel fabrication of CMOS electronics and chip integrated fuel cell structures in the same production line.

Published in:

Solid-State Circuits Conference - Digest of Technical Papers, 2009. ISSCC 2009. IEEE International

Date of Conference:

8-12 Feb. 2009