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Synthesis and characterization of TiO2Ge nanocomposites

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6 Author(s)
Goyal, Amita ; Department of Physics and Astronomy, University of Delaware, Newark, Delaware 19716 ; Rumaiz, Abdul K. ; Miao, Y. ; Hazra, Sukti
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Thin films of TiO2Ge nanocomposites were deposited by rf magnetron sputtering from a composite target prepared by pressing a mixture of TiO2 and Ge powders with a ratio 2:1. Thin films were deposited at various rf powers and temperatures and characterized by using x-ray diffraction, x-ray photoelectron spectroscopy, and transmission electron microscopy (TEM). The analyses showed that the film composition changes with the target rf power and substrate temperature with rf power being a bigger contributor to the change. TEM analyses of films revealed that segregated Ge nanograins were formed and were dispersed within the TiO2 matrix. The average grain size of Ge nanograins was between 9 and 15 nm.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:26 ,  Issue: 4 )