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Controllable fabrication of the micropore shape of two-dimensional photonic crystals using holographic lithography

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2 Author(s)
Mei-Li Hsieh ; Institute of Electro-optical Science and Technology, National Taiwan Normal University, Taipei 116, Taiwan ; Lan, Yi-Sheng

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In this study, the micropore shape of two-dimensional (2D) photonic crystal structures can be modified and controlled by the intensity ratio of the incident beams of the holographic lithography. By adjusting the intensity ratio of the incident beams, the micropore shape of 2D hexagonal photonic crystal structure could be adjusted from being circular to being elliptical. Hence, we defined and analyzed the ellipticity of the micropore shape on a 2D photonic crystal structure as a function of the intensity ratio of the incident beams. In addition, we set up an optical holographic system by using three incident beams with different intensities to demonstrate the influence of the intensity ratio of the incident beams on the micropore shape. The optical experimental results show that the ellipticity of the micropore shape decreased with increasing the intensity ratio of the incident beams, which is the same trend as with the theoretical analysis.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:26 ,  Issue: 3 )