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Membrane stacking: A new approach for three-dimensional nanostructure fabrication

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2 Author(s)
Patel, Amil A. ; Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 ; Smith, Henry I.

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Future applications of nanotechnology, including integrated photonics, will require new three-dimensional (3D) fabrication techniques beyond those employed by the semiconductor industry. The authors investigate membrane stacking as a potential avenue for fabricating photonic crystals and other 3D structures with high yield. They fabricated membranes in silicon nitride with freestanding photonic structures and investigated the technology for stacking them.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:25 ,  Issue: 6 )

Date of Publication:

Nov 2007

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