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V-groove plasmonic waveguides fabricated by nanoimprint lithography

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6 Author(s)
Fernandez-Cuesta, I. ; CNM-IMB—Centro Nacional de Microelectrónica—Institut de Microelectrónica de Barcelona (CSIC), Campus de la Universitat Autònoma de Barcelona, 08193-Bellaterra, Spain ; Nielsen, Rasmus Bundgaard ; Boltasseva, Alexandra ; Borrise, Xavier
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Propagation of channel plasmon-polariton modes in the bottom of a metal V groove has been recently demonstrated. It provides a unique way of manipulating light at nanometer length scale. In this work, we present a method based on nanoimprint lithography that allows parallel fabrication of integrated optical devices composed of metal V grooves. This method represents an improvement with respect to previous works, where the V grooves were fabricated by direct milling of the metal, in terms of robustness and throughput.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:25 ,  Issue: 6 )