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Observation of fringelike electron-emission pattern in field emission from Pt field emitter fabricated by electron-beam-induced deposition

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3 Author(s)
Murakami, K. ; Center for Quantum Science and Technology under Extreme Conditions, and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan ; Wakaya, F. ; Takai, M.

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A Pt field emitter with two adjacent emission sites of a gap size of less than 10 nm was fabricated using electron-beam-induced deposition followed by annealing. The emission patterns of electrons from the two adjacent sites were observed by field-emission microscopy at room temperature and 100 K. The striped emission patterns, corresponding to the interference fringes by electron waves in field emission, were observed for the first time. The fringelike electron-emission patterns in this experiment were found to be in a good agreement with those of the Young’s interference from the two emission sites.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:25 ,  Issue: 4 )